VeriFire™ Asphere
Fast, Noncontact, High-Accuracy 3D Metrology of Aspheric Surfaces

The VeriFire™ Asphere provides high resolution surface metrology for quantitative three-dimensional measurements of aspheric shaped surfaces using patented noncontact interferometric techniques for production and process control.

Based on two of ZYGO's core competencies, the patented multi-zoned metrology method provides a high resolution measurement of an aspheric surface. With multiple axes of motorized stages, the VeriFire™ Asphere offers automated alignment, acquisition and analysis. The result is a fast, high resolution quantitative aspheric surface measurement.

VeriFire™ Asphere – Performance Specs Download the full spec sheet (PDF). • Simple repeatability: ≤ 3 nm • Surface measurement repeatability: ≤ 10 nm • TACT: 6-10 minutes (typical) • Part size: 1 mm - 130 mm • Departure from vertex sphere: ≤ R0 800 μm • Departure from asphere design: 10 μm

The VeriFire™ Asphere system is a production friendly vertical workstation for noncontact high-resolution optical metrology of aspheric surfaces. With its high data density measurement, the VeriFire™ Asphere can resolve mid spatial frequency features in addition to the form of an asphere. The three dimensional result provides visibility to localized surface imperfections independent of part orientation – an important capability for insuring accurate process control.

The VeriFire™ Asphere system is configured with a VeriFire™ AT laser Fizeau interferometer and a ZMI 501 displacement interferometer system. The two axes of linear displacement interferometry track the motion of the test part along the optical axis during the multi-step vertical scan with 2.5 nm resolution.

Configured with a high-resolution 1K x 1K imaging camera, the VeriFire™ AT Fizeau interferometer allows for over 700,000 points per measurement to be achieved with the VeriFire™ Asphere. The AT mainframe also offers the ability to perform high accuracy artifact-free interferometry with its Ring of Fire™ extended source. Depending on the diameter of the parts to be measured the VeriFire™ Asphere system can be configured with either a 4-inch or 6-inch mainframe.

The VeriFire™ Asphere system operates on ZYGO's industry-preferred MetroPro® software platform. In addition to the new aspheric metrology capability, the instrument can be utilized as a vertical workstation for metrology of flats, spheres, and radius of curvature measurements. The advanced software algorithms in the VeriFire™ Asphere utilize five axes of motorized stages to provide quick and easy alignment of an asphere. The combination of user independent part set-up and automated acquisition and analysis makes the VeriFire™ Asphere an ideal production metrology solution.

Learn More About It . . .

Click on the appropriate links below to obtain PDF files of informative literature about the VeriFire™ Asphere system.

PDF	VeriFire™ Family Brochure   NEW !
PDF	Brochure for VeriFire™ Asphere
PDF	Spec Sheet for VeriFire™ Asphere
	Note: Adobe Acrobat Reader software is required to view and print pdf files. It is available for most computer platforms, and it's free!  You can download it now by clicking the pdf icon at left.